Skip navigation
Please use this identifier to cite or link to this item:
Title: Nanomechanical and microstructural characterization of sputter deposited ZnO thin films
Authors: Bhardwaj V.
Chowdhury, Rajib
Jayaganthan R.
Published in: Applied Surface Science
Abstract: The nano-mechanical properties of ZnO thin films deposited at different substrate temperature such as (RT) 25 °C, 100 °C, 200 °C, and 300 °C using DC-sputtering on Corning glass substrate were investigated. The ZnO thin films are found to be predominately c-axis (002) oriented. The crystal structure is sensitive to increasing substrate temperature and new set of crystal planes become visible at 300 °C as thin films become highly polycrystalline. The presence of (103) crystal plane is more pronounced with the increasing substrate temperature. However, high crystallinity and peak intensity ratio I (002) /I (103) (counts) is highest for thin films deposited at 100 °C, which is attributed for high hardness and better adhesive properties observed for ZnO thin films. Concomitantly, no major sudden burst of displacement ‘pop-in’ event in load-displacement curve of thin films observed during indentation, indicating the films are dense with low defects and adhered strongly to the substrate. © 2016 Elsevier B.V.
Citation: Applied Surface Science(2016), 389(): 1023-1032
Issue Date: 2016
Publisher: Elsevier B.V.
Keywords: Microstructure
Thin films
ISSN: 1694332
Author Scopus IDs: 57190610026
Author Affiliations: Bhardwaj, V., Department of Metallurgical and Materials Engineering & Centre of Nanotechnology, India
Chowdhury, R., Department of Civil Engineering & Centre of Nanotechnology, Indian Institute of Technology Roorkee, Roorkee, 247667, India
Jayaganthan, R., Department of Metallurgical and Materials Engineering & Centre of Nanotechnology, India, Department of Engineering Design, Indian Institute of Technology Madras, Chennai, 600036, India
Corresponding Author: Jayaganthan, R.; Department of Metallurgical and Materials Engineering & Centre of NanotechnologyIndia; email:
Appears in Collections:Journal Publications [CE]

Files in This Item:
There are no files associated with this item.
Show full item record

Items in Repository are protected by copyright, with all rights reserved, unless otherwise indicated.