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Please use this identifier to cite or link to this item: http://repository.iitr.ac.in/handle/123456789/5343
Title: Adhesion strength and nanomechanical characterization of ZnO thin films
Authors: Bhardwaj V.
Chowdhury R.
Jayaganthan R.
Published in: Journal of Materials Research
Abstract: The present study was focused to investigate mechanical properties of ZnO thin films deposited on fused quartz substrates at different sputtering deposition pressures (5, 10, 15, and 20 mTorr) using DC sputtering. The crystallinity and microstructure show a marked influence on the mechanical properties of ZnO thin films. The structural evolution of the thin films is in (002) plane and influenced by deposition pressure. The intensity of (002) peak of the films rises initially and decreases with further increasing deposition pressure. The mechanical properties such as hardness, Young's modulus, and coefficient of friction of ZnO thin films were measured using three-sided pyramidal Berkovich nanoindentation. The adhesion strength of thin films was measured by using scratch test under ramp loading. Load-displacement profile of thin films at continuous indentation cycle without any discontinuity revealed no fracture, cracking event, and defects, which is a consequence of dense microstructure and good adherence of films to the substrate. ¬© Copyright Materials Research Society 2017.
Citation: Journal of Materials Research(2017), 32(8): 1432-1443
URI: https://doi.org/10.1557/jmr.2017.85
http://repository.iitr.ac.in/handle/123456789/5343
Issue Date: 2017
Publisher: Cambridge University Press
Keywords: adhesive strength
microstructure
nanoindentation
thin films
ISSN: 8842914
Author Scopus IDs: 57190610026
10046255200
6602183770
Author Affiliations: Bhardwaj, V., Department of Metallurgical and Materials Engineering, Indian Institute of Technology Roorkee, Roorkee, 247667, India
Chowdhury, R., Department of Civil Engineering, Indian Institute of Technology Roorkee, Roorkee, 247667, India
Jayaganthan, R., Department of Metallurgical and Materials Engineering, Indian Institute of Technology Roorkee, Roorkee, 247667, India, Department of Engineering Design, Indian Institute of Technology Madras, Chennai, 600036, India
Corresponding Author: Jayaganthan, R.; Department of Metallurgical and Materials Engineering, Indian Institute of Technology RoorkeeIndia; email: rjayafmt@iitr.ernet.in
Appears in Collections:Journal Publications [CE]

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