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Title: Direct transformation of amorphous to preferentially oriented rutile phase in DC sputtered TiO2 thin film
Authors: Rath H.
Dash P.
Som T.
Singh U.P.
Mishra N.C.
Published in: Advanced Science Letters
Abstract: Formation of preferentially (101) oriented rutile phase directly, without the conventionally observed intermediate anatase phase of TiO2 is reported in thin films prepared by direct current (dc) magnetron sputtering of titanium metal target. The films were annealed at different temperatures between 400 and 1000 °C in air for 1 hour. The structural and micro structural properties of TiO2 thin film, investigated by glancing angle X-ray diffraction and atomic force microscopy (AFM) indicated that the rutile grains are single crystalline and these grow preferentially along (111) plane with increasing annealing temperature. The as-deposited titanium thin film was amorphous, whereas the titanium thin film annealed in the range of 400-1000 °C showed phase pure rutile structure. The root mean square roughness estimated from AFM study is found to increase with annealing temperature and rate of increase was identical to that of the grain size. The present study thus addresses the question of the phase transformation mechanism in TiO2 on annealing at high temperatures leading to the formation of preferentially oriented rutile phase without the formation of the intermediate anatase phase. © 2014 American Scientific Publishers All rights reserved.
Citation: Advanced Science Letters (2014), 20(43894): 638-642
Issue Date: 2014
Publisher: American Scientific Publishers
Keywords: AFM
Crystal growth
ISSN: 19366612
Author Scopus IDs: 55397429100
Author Affiliations: Rath, H., Department of Physics, Utkal University, Bhubaneswar 751004, India
Dash, P., Department of Physics, Utkal University, Bhubaneswar 751004, India
Som, T., Institute of Physics, Bhubaneswar 751005, India
Singh, U.P., KIIT University, Bhubaneswar 751024, India
Mishra, N.C., Department of Physics, Utkal University, Bhubaneswar 751004, India
Corresponding Author: Rath, H.; Department of Physics, Utkal University, Bhubaneswar 751004, India
Appears in Collections:Journal Publications [CY]

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