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Please use this identifier to cite or link to this item: http://repository.iitr.ac.in/handle/123456789/27648
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dc.contributor.authorWang T.-
dc.contributor.authorFujita H.-
dc.contributor.authorMitra, Anirban-
dc.contributor.authorTsubakimoto K.-
dc.contributor.authorFujimoto Y.-
dc.contributor.authorYoshida H.-
dc.contributor.authorNakatsuka M.-
dc.date.accessioned2022-06-21T06:53:43Z-
dc.date.available2022-06-21T06:53:43Z-
dc.date.issued2005-
dc.identifier.citation2005 Conference on Lasers and Electro-Optics, CLEO (2005), 1: 773-775-
dc.identifier.isbn1557527954-
dc.identifier.isbn9781557527950-
dc.identifier.urihttps://doi.org/10.1109/cleo.2005.201918-
dc.identifier.urihttp://repository.iitr.ac.in/handle/123456789/27648-
dc.description.abstractA double pass diode-pumped Nd:YAG rod laser pre-amplifier for EUV lithography has been demonstrated. An average output power as great as 81W with excellent beam quality is available for injection pulse duration of 300ps. © 2005 Optical Society of America.-
dc.language.isoen_US-
dc.publisherOptical Society of America-
dc.relation.ispartof2005 Conference on Lasers and Electro-Optics, CLEO-
dc.relation.ispartof2005 Conference on Lasers and Electro-Optics, CLEO-
dc.subjectLaser pulses-
dc.subjectPhotolithography-
dc.subjectPower amplifiers-
dc.subjectBeam quality-
dc.subjectEUV lithography-
dc.subjectPulse duration-
dc.subjectNeodymium lasers-
dc.titleHigh power amplification of solid-state Nd:YAG laser with short pulses of 300ps/5kHz-
dc.typeConference Paper-
dc.scopusid11539659800-
dc.scopusid7403553527-
dc.scopusid57209787039-
dc.scopusid6603920782-
dc.scopusid7402832563-
dc.scopusid55746944400-
dc.scopusid57201601649-
dc.affiliationWang, T., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan-
dc.affiliationFujita, H., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan-
dc.affiliationMitra, A., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan-
dc.affiliationTsubakimoto, K., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan-
dc.affiliationFujimoto, Y., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan-
dc.affiliationYoshida, H., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan-
dc.affiliationNakatsuka, M., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan-
dc.description.funding-
dc.description.correspondingauthorWang, T.; Institute of Laser Engineering, 2-6 Yamada-oka, Suita, Osaka 565, Japan; email: twang@ile.osaka-u.ac.jp-
dc.identifier.conferencedetails2005 Conference on Lasers and Electro-Optics, CLEO, Baltimore, MD, 22 - 27, May, 2005-
Appears in Collections:Conference Publications [PH]

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