http://repository.iitr.ac.in/handle/123456789/27648| Title: | High power amplification of solid-state Nd:YAG laser with short pulses of 300ps/5kHz |
| Authors: | Wang T. Fujita H. Mitra, Anirban Tsubakimoto K. Fujimoto Y. Yoshida H. Nakatsuka M. |
| Published in: | 2005 Conference on Lasers and Electro-Optics, CLEO 2005 Conference on Lasers and Electro-Optics, CLEO |
| Abstract: | A double pass diode-pumped Nd:YAG rod laser pre-amplifier for EUV lithography has been demonstrated. An average output power as great as 81W with excellent beam quality is available for injection pulse duration of 300ps. © 2005 Optical Society of America. |
| Citation: | 2005 Conference on Lasers and Electro-Optics, CLEO (2005), 1: 773-775 |
| URI: | https://doi.org/10.1109/cleo.2005.201918 http://repository.iitr.ac.in/handle/123456789/27648 |
| Issue Date: | 2005 |
| Publisher: | Optical Society of America |
| Keywords: | Laser pulses Photolithography Power amplifiers Beam quality EUV lithography Pulse duration Neodymium lasers |
| ISBN: | 1557527954 9781557527950 |
| Author Scopus IDs: | 11539659800 7403553527 57209787039 6603920782 7402832563 55746944400 57201601649 |
| Author Affiliations: | Wang, T., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan Fujita, H., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan Mitra, A., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan Tsubakimoto, K., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan Fujimoto, Y., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan Yoshida, H., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan Nakatsuka, M., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan |
| Funding Details: | |
| Corresponding Author: | Wang, T.; Institute of Laser Engineering, 2-6 Yamada-oka, Suita, Osaka 565, Japan; email: twang@ile.osaka-u.ac.jp |
| Appears in Collections: | Conference Publications [PH] |
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