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Please use this identifier to cite or link to this item: http://repository.iitr.ac.in/handle/123456789/22355
Title: Optimization of NCFET by Matching Dielectric and Ferroelectric Nonuniformly Along the Channel
Authors: Kao M.-Y.
Lin Y.-K.
Agarwal H.
Liao Y.-H.
Kushwaha P.
Dasgupta, Avirup
Salahuddin S.
Hu C.
Published in: IEEE Electron Device Letters
Abstract: A new design to overcome the nonuniformity of capacitance matching along the channel of a negative capacitance field-effect transistor is presented in this letter. By introducing nonuniform oxidation, the thickness of SiO2 at the edge regions of the channel can be increased while maintaining the thickness of SiO2 at the center region of the channel. As a result, the capacitance along the channel becomes more uniform, and better capacitance matching between the dielectric and ferroelectric can be achieved. The Sentaurus TCAD results show improvement of matching in the center region and a significant boost of ON-current (20% improvement). © 2019 IEEE.
Citation: IEEE Electron Device Letters, 40(5): 822-825
URI: https://doi.org/10.1109/LED.2019.2906314
http://repository.iitr.ac.in/handle/123456789/22355
Issue Date: 2019
Publisher: Institute of Electrical and Electronics Engineers Inc.
Keywords: capacitance matching
ferroelectric
NCFET
sub 60mV/decade
TCAD
ISSN: 7413106
Author Scopus IDs: 57201524601
57188827132
53866052200
57191576454
56149406100
56389226300
8544299000
35594318600
Author Affiliations: Kao, M.-Y., Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, United States
Lin, Y.-K., Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, United States
Agarwal, H., Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, United States
Liao, Y.-H., Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, United States
Kushwaha, P., Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, United States
Dasgupta, A., Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, United States
Salahuddin, S., Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, United States
Hu, C., Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, United States
Corresponding Author: Kao, M.-Y.; Department of Electrical Engineering and Computer Sciences, United States; email: mingyenkao@berkeley.edu
Appears in Collections:Journal Publications [ECE]

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