http://repository.iitr.ac.in/handle/123456789/18378| Title: | Influence of sputtering parameters and gases on microstructure of Chromium Nitride films |
| Authors: | Shah H.N. Jayaganthan R. Kaur, Davinder Ch ra R. |
| Published in: | Thin Solid Films |
| Abstract: | Chromium nitride thin films were deposited on SA-304 stainless steel substrates by using direct-current reactive magnetron sputtering. The influence of process conditions such as nitrogen content in the fed gas, substrate temperature, and different sputte |
| Citation: | Thin Solid Films, (2010), 5762- 5768 |
| URI: | https://doi.org/10.1016/j.tsf.2010.05.095 http://repository.iitr.ac.in/handle/123456789/18378 |
| Issue Date: | 2010 |
| Keywords: | Coatings Hardness Scanning electron microscopy Sputtering Surface morphology X-ray diffraction |
| ISSN: | 406090 |
| Author Scopus IDs: | 11140853600 6602183770 7004805387 56591551200 |
| Author Affiliations: | Shah, H.N., Department of Metallurgical and Materials Engineering, Centre of Nanotechnology, Indian Institute of Technology Roorkee, Roorkee-247667, India Jayaganthan, R., Department of Metallurgical and Materials Engineering, Centre of Nanotechnology, I |
| Funding Details: | One of the authors, Hetal N Shah, would like to thank the management of Charotar University of Science and Technology, Changa for their sponsorship in the research work and Quality Improving Program of AICTE, New Delhi, in India for their partial financia |
| Corresponding Author: | Jayaganthan, R.; Department of Metallurgical and Materials Engineering, Centre of Nanotechnology, Indian Institute of Technology Roorkee, Roorkee-247667, India; email: rjayafmt@iitr.ernet.in |
| Appears in Collections: | Conference Publications [PH] |
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