http://repository.iitr.ac.in/handle/123456789/18362| Title: | High power amplification of solid-state Nd: YAG laser with short pulses of 300ps/5kHz |
| Authors: | Wang T. Fujita H. Mitra, Anirban Tsubakimoto K. Fujimoto Y. Yoshida H. Nakatsuka M. |
| Published in: | Proceedings of Optics InfoBase Conference Papers |
| Abstract: | A double pass diode-pumped Nd:YAG rod laser pre-amplifier for EUV lithography has been demonstrated. An average output power as great as 81W with excellent beam quality is available for injection pulse duration of 300ps. © 2005 Optical Society of America. |
| Citation: | Proceedings of Optics InfoBase Conference Papers, (2006). Long Beach, CA |
| URI: | http://repository.iitr.ac.in/handle/123456789/18362 |
| Issue Date: | 2006 |
| Publisher: | Optical Society of America |
| Keywords: | Extreme ultraviolet lithography Pumping (laser) Average output power Diode-pumped Double pass High power amplification Injection pulse ND : YAG lasers Nd:YAG rod Short pulse Neodymium lasers |
| ISBN: | 1557528136; 9781557528131 |
| ISSN: | 21622701 |
| Author Scopus IDs: | 11539659800 7403553527 57209787039 6603920782 7402832563 55746944400 57201601649 |
| Author Affiliations: | Wang, T., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan Fujita, H., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan Mitra, A., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan Tsubakimoto, K., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan Fujimoto, Y., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan Yoshida, H., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan Nakatsuka, M., Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565, Japan |
| Appears in Collections: | Conference Publications [PH] |
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