Substrate Dependent Structural, Morphological, Optical and Wettable Properties of RF-Magnetron Sputtered Nanostructured SiC Thin Films

Please use this identifier to cite or link to this item: http://repository.iitr.ac.in/handle/123456789/16264

Title:	Substrate Dependent Structural, Morphological, Optical and Wettable Properties of RF-Magnetron Sputtered Nanostructured SiC Thin Films
Authors:	S. Mourya J. Jaiswal G. Malik B. Kumar and R. Chandra
Published in:	Proceedings of 18th international workshop on physics of semiconductor devices
Citation:	Proceedings of 18th international workshop on physics of semiconductor devices, (2015)
URI:	http://repository.iitr.ac.in/handle/123456789/16264
Issue Date:	2015
Appears in Collections:	Conference Publications [ECE]

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