http://repository.iitr.ac.in/handle/123456789/16260| Title: | N-and P-type doping in Al-rich AlGaN and A1N |
| Authors: | Sarkar, Biplab Washiyama S. Breckenridge M.H. Klump A. Baker J.N. Reddy P. Tweedie J. Mita S. Kirste R. Irving D.L. Collazo R. Sitar Z. Shenai K.Bakowski M.Dudley M.Ohtani N.Raghothamachar B. |
| Published in: | Proceedings of ECS Transactions |
| Abstract: | Attaining a high conductivity in both p-type and n-type Al-rich AlGaN epitaxial films is necessary for highly efficient deep-UV emitters. While reliable n-type conductivity has been demonstrated in AlxGai-xN up to x < 0.8, achieving a reasonable p-type conductivity is a challenge even in Ga-rich AlGaN films. As one increases the x in AlxGai-xN, several point defects and charge compensators appear in the epitaxial film. This report reviews recent observations on doping, conductivity, point defect control of Al-rich AlGaN films. Discussions on activation energy, state-of-the-art epitaxial material quality, contact formation and surface treatments are also presented. ©The Electrochemical Society. |
| Citation: | Proceedings of ECS Transactions, (2018), 25- 30 |
| URI: | https://doi.org/10.1149/08612.0025ecst http://repository.iitr.ac.in/handle/123456789/16260 |
| Issue Date: | 2018 |
| Publisher: | Electrochemical Society Inc. |
| Keywords: | Activation energy Aluminum gallium nitride Epitaxial films Epitaxial growth Gallium alloys Gallium nitride III-V semiconductors Point defects Semiconducting films Semiconductor alloys Semiconductor doping Silicon carbide Charge compensators Contact formation Epitaxial materials High conductivity N- and p-type doping N-type conductivity P type and N types P type conductivity Aluminum alloys |
| ISBN: | 9.78161E+12 |
| ISSN: | 19386737 |
| Author Scopus IDs: | 57205868869 51261473800 57200504504 55964838400 56194020000 56985105000 23487136400 8535369100 24450568300 7006905380 6701729383 7004338257 |
| Author Affiliations: | Sarkar, B., Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695-7919, United States Washiyama, S., Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695-7919, United States Breckenridge, M.H., Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695-7919, United States Klump, A., Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695-7919, United States Baker, J.N., Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695-7919, United States Reddy, P., Adroit Materials, 2054 Kildaire Farm Road, Suite 205, Cary, NC 27518, United States Tweedie, J., Adroit Materials, 2054 Kildaire Farm Road, Suite 205, Cary, NC 27518, United States Mita, S., Adroit Materials, 2054 Kildaire Farm Road, Suite 205, Cary, NC 27518, United States Kirste, R., Adroit Materials, 2054 Kildaire Farm Road, Suite 205, Cary, NC 27518, United States Irving, D.L., Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695-7919, United States Collazo, R., Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695-7919, United States Sitar, Z., Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695-7919, United States, Adroit Materials, 2054 Kildaire Farm Road, Suite 205, Cary, NC 27518, United States |
| Appears in Collections: | Conference Publications [ECE] |
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