http://repository.iitr.ac.in/handle/123456789/16257| Title: | Au:Ga Alloyed clusters to enhance Al contacts to P-type GaN |
| Authors: | Klump A. Kaess F. Sarkar, Biplab Kirste R. Collazo R. Reddy P. Mita S. Sitar Z. Breckenridge M.H. Kohn E. |
| Published in: | Proceedings of RAPID 2018 - 2018 IEEE Research and Applications of Photonics In Defense Conference |
| Abstract: | Deposition, annealing, and subsequent removal of Au on p-type GaN films reduced the resistivity of subsequently deposited Al metal contacts. The reduction is explained by formation of Au:Ga alloys which remove Ga from the surface, and create Ga-vacancies that surround the electrically active alloy clusters. © 2018 IEEE. |
| Citation: | Proceedings of RAPID 2018 - 2018 IEEE Research and Applications of Photonics In Defense Conference, (2018), 23- 26 |
| URI: | https://doi.org/10.1109/RAPID.2018.8508914 http://repository.iitr.ac.in/handle/123456789/16257 |
| Issue Date: | 2018 |
| Publisher: | Institute of Electrical and Electronics Engineers Inc. |
| Keywords: | Al contacts Alloyed contact Mg-doped GaN ohmic ocntacts p-GaN |
| ISBN: | 9.78154E+12 |
| Author Scopus IDs: | 55964838400 56310683000 57205868869 24450568300 6701729383 56985105000 8535369100 7004338257 57200504504 7102979682 |
| Author Affiliations: | Klump, A., Department of Materials Science and Engineering, North Carolina State Univeristy, Raleigh, United States Kaess, F., Department of Materials Science and Engineering, North Carolina State Univeristy, Raleigh, United States Sarkar, B., Department of Materials Science and Engineering, North Carolina State Univeristy, Raleigh, United States Kirste, R., Adroit Materials, Raleigh, United States Collazo, R., Department of Materials Science and Engineering, North Carolina State Univeristy, Raleigh, United States Reddy, P., Adroit Materials, Raleigh, United States Mita, S., Adroit Materials, Raleigh, United States Sitar, Z., Department of Materials Science and Engineering, North Carolina State Univeristy, Raleigh, United States Breckenridge, M.H., Department of Materials Science and Engineering, North Carolina State Univeristy, Raleigh, United States Kohn, E., Department of Materials Science and Engineering, North Carolina State Univeristy, Raleigh, United States |
| Funding Details: | ACKNOWLEDGMENT We sincerely thank the support from NSF (ECCS-1610992, DMR-1312582, ECCS-1508854, DMR-1508191) and ARO (W911NF-15-2-0068, W911NF-16-C-0101) for funding this work. This work was performed in part at the Analytical Instrumentation Facility (AIF), which is supported by the State of North Carolina and the National Science Foundation (award number ECCS-1542015). |
| Appears in Collections: | Conference Publications [ECE] |
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