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Please use this identifier to cite or link to this item: http://repository.iitr.ac.in/handle/123456789/15231
Title: Fabrication and Characterization of Carbon Nanotube Microdevices for CO2 Gas Sensing and Other Applications
Authors: Kumar N.
Navani, Naveen Kumar
Manhas, Sanjeev Kumar
Published in: Proceedings of 2019 International Conference on Electrical, Electronics and Computer Engineering, UPCON 2019
Abstract: In this paper, we discuss different types of cost-effective microelectrodes fabricated with the lithography process. The device with interdigitated electrodes is fabricated using Gold (Au) nanoparticles (NPs) decorated semiconducting single-walled carbon nanotubes (SWNTs). We present the fabrication steps including the metal deposition and etching process to fabricate the electrodes. The electrodes are fabricated on the SiO2/Si and glass substrate. The metal film of 200 nm thickness is deposited on the substrate with an electron beam evaporation system. The minimum space between the electrodes is found to be 3 mu mathrmm. The circular interdigitated metal electrodes have a larger area in comparison to the other types of interdigitated electrodes structures. Further, we fabricate Au NPs decorated SWNT-based devices with interdigitated electrodes. The fabricated devices show a good response to CO2 gas sensing. The sensor shows a sensitivity of 11% with 6 s response time to CO2 gas. The recovery time of the sensor is calculated to be 9 s. The devices reported in this work can be used for biosensors and microfluidic channel applications. © 2019 IEEE.
Citation: Proceedings of 2019 International Conference on Electrical, Electronics and Computer Engineering, UPCON 2019, (2019)
URI: https://doi.org/10.1109/UPCON47278.2019.8980140
http://repository.iitr.ac.in/handle/123456789/15231
Issue Date: 2019
Publisher: Institute of Electrical and Electronics Engineers Inc.
Keywords: Etching
fabrication
interdigitated electrodes
lithography
single-walled carbon nanotubes (SWNTs)
ISBN: 9.78E+12
Author Scopus IDs: 57190668111
6507073924
6602269066
Author Affiliations: Kumar, N., IIT Roorkee, ECE Department, Roorkee, India
Navani, N.K., Biotechnology, IIT Roorkee, Roorkee, India
Manhas, S.K., IIT Roorkee, ECE Department, Roorkee, India
Appears in Collections:Conference Publications [BT]

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