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Please use this identifier to cite or link to this item: http://repository.iitr.ac.in/handle/123456789/14008
Title: Ion implantation induced phase transformation and enhanced crystallinity of as deposited copper oxide thin films by pulsed laser deposition
Authors: Bind U.C.
Dutta, Raj Kumar
Sekhon G.K.
Yadav, Kamlesh Kumar
Krishna J.B.M.
Menon R.
Nabhiraj P.Y.
Published in: Superlattices and Microstructures
Abstract: Copper oxide thin film of about 260-280 nm thickness was deposited using pulsed laser deposition (PLD) on glass substrate at 350 °C and post depositional sample treatment was performed by ion implantation with 50 keV N5+ ion beam with varying particle fluence. Amorphous copper oxide thin film deposited at 80 mTorr partial pressure of oxygen was transformed to cubic Cu<inf>2</inf>O phase (20.2 nm) when implanted at 1 × 1016 particles/cm2. While mixed Cu<inf>2</inf>O and CuO phases in the thin film deposited at 100 mTorr oxygen pressure was transformed to single phase of Cu<inf>2</inf>O (23.5 nm), with enhanced crystallinity when implanted with 2.5 × 1015 particles/cm2. The phase transformation and improved crystallinity is attributed to thermal effect owing to stopping of incident ion beam. Implantation with higher particle fluence led to transformation to CuO phase with reduced crystallite sized and the increased electrical conductivity. © 2015 Elsevier Ltd. All rights reserved.
Citation: Superlattices and Microstructures (2015), 84(): 24-35
URI: https://doi.org/10.1016/j.spmi.2015.03.064
http://repository.iitr.ac.in/handle/123456789/14008
Issue Date: 2015
Publisher: Academic Press
Keywords: Crystalline nanoparticles
Cu<inf>2</inf>O
Ion implantation
Phase transformation
Pulsed laser deposition
ISSN: 7496036
Author Scopus IDs: 56194352800
47161194700
56641004900
7005825645
14041865600
36515177300
6507522339
Author Affiliations: Bind, U.C., Centre of Nanotechnology, Indian Institute of Technology Roorkee, Roorkee, 247667, India
Dutta, R.K., Centre of Nanotechnology, Indian Institute of Technology Roorkee, Roorkee, 247667, India, Department of Chemistry, Indian Institute of Technology Roorkee, Roorkee, 247667, India
Sekhon, G.K., Department of Physics, Indian Institute of Technology Roorkee, Roorkee, 247667, India
Yadav, K.L., Department of Physics, Indian Institute of Technology Roorkee, Roorkee, 247667, India
Krishna, J.B.M., UGC-DAE-CSR, Kolkata Centre, Bidhannagar, LB-8/III, Kolkata, 700091, India
Menon, R., Variable Energy Cyclotron Centre, Bidhannagar, AF/1, Kolkata, 700064, India
Nabhiraj, P.Y., Variable Energy Cyclotron Centre, Bidhannagar, AF/1, Kolkata, 700064, India
Funding Details: The author UCB is grateful to Ministry of Human Resources Development (MHRD), Government of India for offering Senior Research Fellowship. Authors are grateful to UGC-DAE-CSR-Kolkata Centre for sanctioning research grant UGC-DAE-CSR-KC/CRS/13/MS05/0815 .
Corresponding Author: Dutta, R.K.; Department of Chemistry, Indian Institute of Technology RoorkeeIndia
Appears in Collections:Journal Publications [CY]
Journal Publications [PH]

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