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Title: Electrical and structural characteristics of sputtered c-oriented AlN thin films on Si (100) and Si (110) substrates
Authors: Pey A.
Kaushik J.
Dutta S.
Kapoor A.K.
Kaur, Davinder
Published in: Thin Solid Films
Abstract: This paper discussed about the morphological and electrical properties of c-axis oriented aluminium nitride (AlN) thin films grown on Si (100) and Si (110) substrates by direct current (DC) reactive sputtering technique. Both the films showed intense (002
Citation: Thin Solid Films (2018), 666(): 143-149
Issue Date: 2018
Publisher: Elsevier B.V.
Keywords: Aluminium nitride
Dielectric constant
Metal-insulator-semiconductor structure
Trapped charges
ISSN: 406090
Author Scopus IDs: 35355067700
Author Affiliations: Pandey, A., Solid State Physics Laboratory, DRDO, Lucknow Road, Timarpur, Delhi 110054, India, Department of Physics and Centre for Nanotechnology, Indian Institute of Technology Roorkee, Roorkee, 247667, India
Kaushik, J., Solid State Physics Laborator
Appears in Collections:Journal Publications [PH]

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