http://repository.iitr.ac.in/handle/123456789/13740| Title: | Electrical and structural characteristics of sputtered c-oriented AlN thin films on Si (100) and Si (110) substrates |
| Authors: | Pey A. Kaushik J. Dutta S. Kapoor A.K. Kaur, Davinder |
| Published in: | Thin Solid Films |
| Abstract: | This paper discussed about the morphological and electrical properties of c-axis oriented aluminium nitride (AlN) thin films grown on Si (100) and Si (110) substrates by direct current (DC) reactive sputtering technique. Both the films showed intense (002 |
| Citation: | Thin Solid Films (2018), 666(): 143-149 |
| URI: | https://doi.org/10.1016/j.tsf.2018.09.016 http://repository.iitr.ac.in/handle/123456789/13740 |
| Issue Date: | 2018 |
| Publisher: | Elsevier B.V. |
| Keywords: | Aluminium nitride Dielectric constant Metal-insulator-semiconductor structure Morphology Trapped charges |
| ISSN: | 406090 |
| Author Scopus IDs: | 35355067700 55550373500 50461340300 57206382684 7004805387 |
| Author Affiliations: | Pandey, A., Solid State Physics Laboratory, DRDO, Lucknow Road, Timarpur, Delhi 110054, India, Department of Physics and Centre for Nanotechnology, Indian Institute of Technology Roorkee, Roorkee, 247667, India Kaushik, J., Solid State Physics Laborator |
| Appears in Collections: | Journal Publications [PH] |
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